Performance of A Monolithic E-Nose Array Integrating MEMS and ALD Processing

被引：0

作者：

Zhou, Yilu ^{[1
]}

Dieffenderfer, James ^{[1
]}

Sennik, Erdem ^{[1
]}

Aleem, Mahaboobbatcha ^{[1
]}

Speight, Jakob ^{[1
]}

Vasisht, Shrey ^{[1
]}

Oralkan, Omer ^{[1
]}

Lee, Bongmook ^{[2
]}

Misra, Veena ^{[1
]}

机构：

[1] North Carolina State Univ, Department Elect & Comp Engn, Raleigh, NC 27695 USA

[2] SUNY Polytech Inst, Utica, NY USA

来源：

2023 IEEE SENSORS | 2023年

基金：

美国国家科学基金会;

关键词：

Gas Sensor; ALD; Metal Oxide; MOx; E-Nose; Monolithic Array; VOC; Nitrogen Dioxide; Carbon Monoxide; Ethanol; Mixture; MEMS; BEOL; Microheater; Dry Etching; SnO2; MICROHEATER; MECHANISM; SENSORS;

D O I：

10.1109/SENSORS56945.2023.10325054

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

We demonstrate a novel electronic nose (E-nose), which combines microelectromechanical systems (MEMS) and atomic layer deposition (ALD) technologies. MEMS micromachining creates a monolithic microheater array, consisting of independently controlled rows. By changing temperature profiles, a wide range of sensing surfaces are available. Sensor electrodes are arranged in crossbars with microheater rows. SnO2 thin film is deposited on this array as sensing materials by ALD. This E-nose demonstrates excellent fundamental operating characteristics such as speed and repeatability. It is ultra-sensitive against multiple volatile organic compounds (VOCs). It can also intrinsically separate VOC mixtures by tuning its operating modes.

引用

页数：4

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