Rapid prototyping of 1xN multifocus gratings via additive direct laser writing

被引:1
|
作者
Reischke, Marie [1 ,2 ,3 ]
Vanderpoorten, Oliver [1 ]
Strohl, Florian [1 ]
机构
[1] UiT Arctic Univ Norway, Dept Phys & Technol, Tromso, Norway
[2] Max Planck Inst Sci Light MPL, Erlangen, Germany
[3] Friedrich Alexander Univ Erlangen Nurnberg, Dept Phys, Erlangen, Germany
来源
关键词
Additive manufacturing; Two-photon; Direct laser writing; Photolithography; 3D microscopy; SU-8; Diffraction grating; MICROSCOPY; PHASE;
D O I
10.1016/j.mne.2023.100186
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Multifocus gratings (MFGs) enable microscopes and other imaging systems to record entire Z-stacks of images in a single camera exposure. The exact grating shape depends on microscope parameters like wavelength and magnification and defines the multiplexing onto a grid of MxN Z-slices. To facilitate the swift production and alteration of MFGs for a system and application at hand, we have developed a fabrication protocol that allows manufacturing of 1xN MFGs within hours and without the requirement of clean room facilities or hazardous etching steps. Our approach uses photolithography with a custom-built stage-scanning direct laser writing (DLW) system. By writing MFG grating lines into spin-coated negative tone SU-8 photoresist, polymerized parts are crafted onto the substrate and thus directly become a part of the grating structure. We provide software to generate the required MFG grating line paths, details of the DLW system and fully characterize a manufactured MFG. Our produced MFG is 5.4 mm in diameter and manages to record an image volume with a Z-span of over 600 & mu;m without spherical aberrations or noticeable loss of resolution.
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页数:7
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