TOWARDS FUNCTIONAL METAMATERIALS AND METADEVICES

Metamaterials, as artificial materials endowed with properties unattainable in natural materials, derive their unique characteristics from the geometry of unit cell. Mechanical structural adjustment of the unit cells enables the modulation of the metamaterial's properties, giving rise to tunable metamaterials and metadevices, which is the recent trends. The integration of Microelectromechanical systems (MEMS) with metamaterials emerges as a key solution to achieve precise control and tunability. This review introduces fundamentals of MEMS, our recent progress on dynamic, functional metamaterials integrated with MEMS and outlook of MEMS-based metamaterials and metadevices.