The Densification Characteristics of Polished Fused Silica Glass and Its Scattering Characteristics

Optical surface scattering is an important subject in the field of optics. Previous studies of surface scattering mainly focused on the influence of surface topography and often ignored the influence of the mechanical property's change caused by polished surface densification. In this paper, we study the mechanical property of fused silica glass in detail and analyze the scattering behaviour of actual fused silica glass's surface with sub-angstrom roughness, considering the topography and the change of refractive index. Experimental results show that there is a negative correlation between the height and modulus on the surface of roughly polished fused silica glass, and the correlation coefficient gamma = -0.29 was determined. After super-polishing, the mechanical properties of the sample surface become significantly uniform with a roughness of Rq = 0.06 nm and Ra = 0.05 nm, and the correlation coefficient becomes gamma = -0.02. Moreover, the nanoindentation test proves that silica glass surfaces have been densified during polishing. Based on the densification characteristics, the bidirectional reflectance distribution function (BRDF) was simulated by the finite element method. The result indicates that the densification characteristics will increase the scattering intensity. This work not only deepens the understanding of the properties of polished optical surfaces but also the surface scattering characteristics of optical elements.