Multipurpose Silicon-chip Flow Cell for Liquid Transmission Electron Microscopy and Related Analysis

被引:0
|
作者
Murakami, Tomoki [1 ]
Yukino, Ryoji [1 ]
Takamura, Tsukasa [2 ]
Satake, Naohito [1 ]
Fujimoto, Mitsuki [1 ]
Li, Xiaoguang [3 ]
Takeguchi, Masaki [4 ]
Ishida, Makoto [5 ]
Sandhu, Adarsh [1 ]
机构
[1] Univ Electrocommun, Grad Sch Informat & Engn, 1-5-1 Chofugaoka, Chofu, Tokyo 1828585, Japan
[2] Chiba Prefecture Govt, Commerce Ind & Lab Dept, Ind Promot Div, 1-1 Ichiba Cho, Chuo Ku, Chiba, Chiba 2600855, Japan
[3] Tokyo Inst Technol, Dept Elect & Elect Engn, 2-12-2 Meguro, Tokyo 1528552, Japan
[4] Natl Inst Mat Sci, Nanostruct Characterizat Grp, 1-2-1 Sengen, Tsukuba, Ibaraki 3050047, Japan
[5] Toyohashi Univ Technol, Elect Inspired Interdisciplinary Res Inst EIIRIS, 1-1 Hibarigaoka, Tempaku Cho, Toyohashi, Aichi 4418580, Japan
基金
日本科学技术振兴机构;
关键词
liquid flow cell transmission electron microscopy; materials science; in situ analysis; MEMS;
D O I
10.18494/SAM4396
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We describe the development and applications of a flow cell chip for liquid transmission electron microscopy (TEM) for imaging nanoparticles, biological samples, and dynamic phenomena such as the freezing and melting of liquids, and Raman scattering measurements. The liquid flow cell (LFC) consists of two silicon chips with silicon nitride windows that sandwich two flexible microtubes. Notably, our LFC can be removed from the TEM holder for analysis with other instruments, whereas conventional LFC cannot be removed from the TEM holder for post-experiment analysis. Furthermore, currently available commercial solution holders only allow a portion of the flowing solution to enter the cell, but our LFC has observation windows in the flow channel that make it easier to control the experimental conditions. Importantly, we also describe the results of using our LFC chip for imaging the freezing and melting of water that was slowly cooled by a Peltier element to initiate freezing or heated to induce melting. This research shows that our LFC is a powerful component for imaging the temperature dependence of materials at the nanoscale for a wide range of applications including combining TEM with light scattering analysis of materials such as Raman spectroscopy.
引用
收藏
页码:1801 / 1811
页数:11
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