Measuring Micrometer-Level Vibrations With mmWave Radar

被引:24
|
作者
Guo, Junchen [1 ]
He, Yuan [1 ]
Jiang, Chengkun [1 ]
Jin, Meng [1 ]
Li, Shuai [1 ]
Zhang, Jia [1 ]
Xi, Rui [1 ]
Liu, Yunhao [1 ]
机构
[1] Tsinghua Univ, Sch Software & Automation Dept, Beijing, Peoples R China
基金
国家重点研发计划;
关键词
Vibrations; Vibration measurement; Radar; Measurement errors; Frequency measurement; Signal to noise ratio; Sensors; Wireless sensing; millimeter wave; vibration measurement;
D O I
10.1109/TMC.2021.3118349
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Vibrations measurement is a crucial task in industrial systems, where vibration characteristics reflect health conditions and indicate anomalies of the devices. Previous approaches either work in an intrusive manner or fail to capture the micrometer-level vibrations. In this work, we propose mmVib, a practical approach to measure micrometer-level vibrations with mmWave radar. First, we derive a metric called Vibration Signal-to-Noise Ratio (VSNR) that highlights the directions of reducing measurement errors of tiny vibrations. Then, we introduce the design of mmVib based on the concept of Multi-Signal Consolidation (MSC) for the error reduction and multi-object measurement. We implement a prototype of mmVib, and the experiments show that it achieves 3.946% relative amplitude error and 0.02487% relative frequency error in median. Typically, the average amplitude error is only 3.174um when measuring the 100um-amplitude vibration at around 5 meters. Compared to two existing mmWave-based approaches, mmVib reduces the 80th-percentile amplitude error by 69.21% and 97.99% respectively.
引用
收藏
页码:2248 / 2261
页数:14
相关论文
共 50 条
  • [1] Nanometer-Level Semiconductor Imaging for Micrometer-Level MEMS
    Lin, Burn J.
    28TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE, 2012, 8352
  • [2] Transient Electromagnetic-Thermal Cosimulation for Micrometer-Level Components
    Xue, Yilun
    Ren, Qiang
    Chen, Jiefu
    Zhou, Yuanguo
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2021, 69 (10) : 4341 - 4351
  • [3] Ultrasonic linear motor permits micrometer-level positioning, speed control
    Anon
    JEE. Journal of electronic engineering, 1993, 30 (319): : 56 - 57
  • [4] Effect of tool size on the cutting of aluminum film with micrometer-level thickness
    Ye, Xuan
    Wang, Tao
    Liu, Xiaoming
    Wei, Yueguang
    INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2022, 241
  • [5] Micrometer-level naked-eye detection of caesium particulates in the solid state
    Mori, Taizo
    Akamatsu, Masaaki
    Okamoto, Ken
    Sumita, Masato
    Tateyama, Yoshitaka
    Sakai, Hideki
    Hill, Jonathan P.
    Abe, Masahiko
    Ariga, Katsuhiko
    SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, 2013, 14 (01)
  • [6] Long single-mode fiber optical lengths measured to micrometer-level precision
    不详
    LASER FOCUS WORLD, 2015, 51 (10): : 9 - 9
  • [7] Deep Penetration of Nanolevel Drugs and Micrometer-Level T Cells Promoted by Nanomotors for Cancer Immunochemotherapy
    Chen, Huan
    Shi, Tao
    Wang, Yue
    Liu, Zhiyong
    Liu, Fangcen
    Zhang, Huanyu
    Wang, Xingwen
    Miao, Zhuoyue
    Liu, Baorui
    Wan, Mimi
    Mao, Chun
    Wei, Jia
    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2021, 143 (31) : 12025 - 12037
  • [8] Miniaturized Micrometer-Level Copper Wiring and Electrodes Based on Reverse-Offset Printing for Flexible Circuits
    Eiroma, Kim
    Sneck, Asko
    Halonen, Olli
    Happonen, Tuomas
    Sandberg, Henrik
    Leppaniemi, Jaakko
    ACS APPLIED ELECTRONIC MATERIALS, 2025,
  • [9] Comb-calibrated laser ranging for three-dimensional surface profiling with micrometer-level precision at a distance
    Baumann, E.
    Giorgetta, F. R.
    Deschenes, J. -D.
    Swann, W. C.
    Coddington, I.
    Newbury, N. R.
    OPTICS EXPRESS, 2014, 22 (21): : 24914 - 24928
  • [10] A Specular Stepped Surface Profile Measurement System Based on Fringe Reflection Principle with Micrometer-level Height Resolution
    Wan Xin-jun
    Lu Song
    Song Ke
    Xie Shu-ping
    ACTA PHOTONICA SINICA, 2020, 49 (04)