High-Precision Positioning Stage Control Based on a Modified Disturbance Observer

High-precision positioning systems play a crucial role in various industrial applications. This study focuses on improving the performance of a high-precision multi-degrees-of-freedom (DOF) stage. In terms of the controller design, the following two key challenges must be addressed: the cross-decoupling of different DOFs and the impact of external disturbances. To address these problems, a self-tuning approach is proposed for simultaneous decoupling and disturbance suppression. Initially, the stage undergoes static decoupling using a data-based approach, facilitating feedback control for each DOF through single-input, single-output controllers. Addressing dynamic coupling and external disturbance challenges, we introduced a comprehensive evaluation index and a self-tuning multi-input, multi-output disturbance observer. This approach enabled the evaluation and optimization of the disturbance compensation for all DOFs, ensuring optimal positioning accuracy. Finally, we tested the proposed method using a high-precision multi-DOF stage with a real-time control platform. The results demonstrated a significant reduction in the standard deviations of positioning errors in the rx, ry, and z directions by 46%, 58%, and 6%, respectively. The approach used in this study opens avenues for advancements in the design and control of complex multi-DOF systems.