[1] Univ Shanghai Sci & Technol, Sch Mat & Chem, Shanghai 200093, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
[3] Shanghai Inst IC Mat Co Ltd, Shanghai 201899, Peoples R China
[4] Shanghai Univ, Mat Genome Inst, 99 Shangda Rd, Shanghai 200444, Peoples R China
[5] Shanghai Univ, Sch Microelect, Shanghai 200444, Peoples R China
[6] ShanghaiTech Univ, Sch Pys Sci & Technol, Shanghai 201210, Peoples R China