ELECTRONIC-NOSE: AN ARRAY OF 16 MOS-GAS SENSORS INTEGRATED WITH TEMPERATURE AND MOISTURE SENSING CAPABILITIES

被引：2
|
作者：
Yue, Xiawei [1 ,2 ]
Wei, Shuai [1 ,2 ]
Zhang, Pingping [3 ]
Zhou, Zhitao [1 ]
Tao, Tiger H. [1 ,2 ,4 ,5 ,6 ,7 ]
Qin, Nan [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai, Peoples R China
[2] Univ Chinese Acad Sci, Sch Grad Study, Beijing 100049, Peoples R China
[3] Suzhou Huiwen Nanotechnol Co Ltd, Suzhou, Peoples R China
[4] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing, Peoples R China
[5] ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai, Peoples R China
[6] Shanghai Res Ctr Brain Sci & Brain Inspired Intel, Shanghai, Peoples R China
[7] Neuroxess Co Ltd Jiangxi, Nanchang 330029, Jiangxi, Peoples R China
来源：
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年
基金：
中国国家自然科学基金;
关键词：
Gas Sensor Array; Electronic-nose; Long-term Stability; Micro Electromechanical System; QUALITY;
D O I：
10.1109/MEMS49605.2023.10052638
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a new design of electronic-nose based on the Micro Electromechanical System (MEMS). An array of multiple metal-oxide semiconductor (MOS) gas sensors integrated with temperature and moisture sensing channels are fabricated on a single chip. Benefiting from the heat and humidity sensing capabilities, this electronic-nose exhibits an enhanced gas sensing property with improved accuracy. As low as 0.2 ppm of H2S can be successfully identified, and the resistance of the gas sensor corresponding to the long-term stability drifts only about 3% after 100 days. It opens up new opportunities for fabricating bionic olfactory microsystems with multiple sensing channels and shows its potential for precisely detecting complex gases in practical applications.
引用
收藏
页码：807 / 810
页数：4
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