Multi-objective optimization design of flexible positioning platform considering its natural frequency and mass

In this paper, the ultra-high acceleration macro-micro motion platform flexible positioning platform is taken as the research object. First, the finite element modal analysis is performed using the finite element technique, and the natural frequencies and mode shapes of the flexible positioning platform are obtained. Then, using the response surface optimization design method, the low-order natural frequency of the flexible positioning platform is increased, and its mass is decreased. Finally, the experimental modal analysis of the flexible positioning platform is carried out, and the experimental modal parameters of the flexible positioning platform are calculated. The experimental results are basically consistent with the finite element analysis results, which verify the accuracy of the finite element modal analysis. The research results are of great significance to the development of the ultra-high acceleration macro-micro motion platform.