Fluid lubricated polishing based on shear thickening

With the development of short wavelength optics, high requirements are put forward for the full frequency errors of optical elements, while the processing efficiency and surface quality of traditional polishing methods are difficult to meet their requirements. In this paper, a fluid lubricated polishing method is proposed by combining non-Newtonian fluid with traditional polishing methods. According to Preston equation and shear thickening principle, the tool influence function of fluid lubricated polishing is established and verified by experiments. The results show that the fluid lubricated polishing has a very good convergence ability to the full frequency error of the workpiece. In addition, the convergence rate of fluid lubricated polishing on roughness is about twice that of chemical mechanical polishing. Finally, fluid lubricated polishing extends Preston from Newtonian fluid polishing to non-Newtonian fluid polishing. (c) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement