Randomized Benchmarking Using Nondestructive Readout in a Two-Dimensional Atom Array

Neutral atoms are a promising platform for scalable quantum computing, however, prior demonstration of high fidelity gates or low-loss readout methods have employed restricted numbers of qubits. Using randomized benchmarking of microwave-driven single-qubit gates, we demonstrate average gate errors of 7(2) x 10-5 on a 225 site atom array using conventional, destructive readout. We further demonstrate a factor of 1.7 suppression of the primary measurement errors via low-loss, nondestructive, and stateselective readout on 49 sites while achieving gate errors of 2(9) x 10-4.