A ONE-STEP SOFT LITHOGRAPHY TECHNIQUE FOR MAKING MICROFLUIDIC PDMS CHIPS WITH MACRO-SCALE STRUCTURES

被引:0
|
作者
Gao, Shiyuan [1 ,2 ,3 ]
Xu, Tiegang [1 ,2 ]
Wu, Lei [1 ,2 ]
Zhu, Xiaoyue [4 ]
Li, Chunyong [5 ]
Li, Xinxin [1 ,2 ,3 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
[2] Univ Chinese Acad Sci, Coll Mat Sci & Opto Elect Technol, Beijing 100049, Peoples R China
[3] ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China
[4] Fujian Agr & Forestry Univ, Haixia Inst Sci & Technol, Sch Future Technol, Metabol Ctr, Fuzhou 350002, Fujian, Peoples R China
[5] Fengning Manchu Autonomous Cty Hosp, Chengde 068350, Hebei, Peoples R China
基金
国家重点研发计划; 中国国家自然科学基金;
关键词
PDMS chip; one-step molding technique; soft lithography; reservoirs; FUTURE;
D O I
10.1109/MEMS58180.2024.10439485
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A one-step molding technique was developed to fabricate a PDMS chip containing both microstructures and macrostructures such as inlets, outlets and reservoirs. The most critical step for molding was to establish the connection between macroscale and microscale features, which was achieved by blocking the through hole of a rigid mold with an elastic cone. The elastic cones and macrostructures were fabricated on the elastic mold, while micro structures were fabricated on the rigid mold. As a result, a digital PCR chip with four sample throughputs has been successfully fabricated. This technique is expected to be used to fabricate a wide variety of microfluidic chips.
引用
收藏
页码:1170 / 1173
页数:4
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