Analysis of defocus error on the absolute measurement of spherical surface

被引：0

作者：

Guo, Jingming ^{[1
]}

Han, Sen ^{[1
,2
]}

Zhang, Linghua ^{[1
,2
]}

Shen, Yuhang ^{[1
]}

Lv, Wujun ^{[1
]}

Yang, Ying ^{[1
]}

Gong, Chenxi ^{[1
]}

Li, Yuhang ^{[1
]}

Han, Manlin ^{[2
]}

机构：

[1] Univ Shanghai Sci & Technol, Sch Opt Elect & Comp Engn, Shanghai 200093, Peoples R China

[2] Suzhou H&L Instruments LLC, Suzhou 215123, Peoples R China

来源：

OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS X | 2023年 / 12769卷

关键词：

Spherical absolute measurement; interferometer; Zemax; defocus error;

D O I：

10.1117/12.2686758

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The spherical absolute measurement is based on the Fizeau interferometry system. The Fizeau interferometer has a common optical path which helps reduce the impact of system-specific errors and has relatively low requirements for environmental changes. In this study, the cat's eye position, confocal position, and confocal rotation 180-degree position involved in three absolute position measurement methods are simulated by using Zemax optical simulation software. The influence of the defocus error on measurement results is analyzed by adjusting parameters. The results of simulation and analysis show that the defocus error will affect the accuracy of the absolute spherical measurement, and the defocus amount and aperture angle will also affect the defocus error.

引用

页数：8

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