Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition

被引：2
|
作者：
Lee, Woo Jin [1 ]
Kim, Sang Ho [1 ]
Eom, Jun Sun [2 ]
Caron, Arnaud [1 ]
机构：
[1] Koreatech Univ, Surface Engn Dept, Mat Sci Engn, 3 Engn Bldg, Cheonan, South Korea
[2] Korea Polytech, Mat & Chem Engn Dept, New Mat Applicat, Techno Hall 211, Daegu, South Korea
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2024年 / 42卷 / 02期
关键词：
FILMS;
D O I：
10.1116/6.0002893
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this work, we use electrolytic copper foils as substrates for the deposition of graphene by chemical vapor deposition. We investigate the effects of preannealing conditions, methane injection time, and temperature to synthesize graphene with a similar quality as when grown on cold-rolled copper. We find that the electrolytic copper foil's annealing conditions and CH4 injection temperature determine the quality of graphene.
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页数：11
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