Wavefront-splitting interferometer based on orbital angular momentum beams

被引：2
|
作者：
Yang, Dong [1 ]
Yang, Zhongming [2 ]
Zhang, Yanfeng [1 ]
机构：
[1] Sun Yat Sen Univ, Sch Elect & Informat Technol, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Peoples R China
[2] Shandong Univ, Sch Informat Sci & Engn, Shandong Prov Key Lab Laser Technol & Applicat, Qingdao 266237, Peoples R China
来源：
OPTICS EXPRESS | 2023年 / 31卷 / 18期
基金：
中国国家自然科学基金;
关键词：
OPTICAL COHERENCE TOMOGRAPHY;
D O I：
10.1364/OE.498081
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Orbital angular momentum (OAM) interferometers have attracted great attention in metrology. However, OAM interferometers usually have large sizes and are difficult to align. OAM-based wavefront-splitting interferometer (WSI-OAM) can achieve nano-displacement measurement with compact size and easy to align. In this manuscript, we propose and demonstrate a nano-displacement measurement system based on WSI-OAM. A resolution of 0.1 nm with an uncertainty of 0.013 nm is achieved with measurement accuracy higher than 99.87% and linearity close to 99%. This work offers a practical approach to miniaturize and integrate OAM interferometers in metrology.& COPY; 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
引用
收藏
页码：28954 / 28962
页数：9
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