Enhanced phase-shifting measurement with a double-passed Michelson interferometer

被引:1
|
作者
Harimoto, Tetsuo [1 ]
机构
[1] Univ Yamanashi, Fac Engn, Dept Adv Mat, Kofu 4008511, Japan
关键词
Double-passed Michelson interferometer; Phase-shifting measurement; Sensitivity improvement;
D O I
10.1007/s10043-023-00814-y
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A double-passed Michelson interferometer for enhanced phase-shifting measurement is described in this paper. Two interference signals concerning measurement and reference beams are generated from a common optical system simultaneously. The enhanced phase-shifting measurement can be achieved through the optimized signal difference of the measurement and reference beams, which can be easily processed and optimized on a computer. The sensitivity improvement of the interferometer by an amplification factor of 9 is experimentally demonstrated. The experimental and theoretical results are found to be in good agreement when the sensitivity ratio is less than 9.
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页码:331 / 335
页数:5
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