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- [6] Laser conditioning of high-reflective and anti-reflective coatings at 1064nm LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 2005, 2005, 5991
- [8] Anti-reflective polymer coatings in optical microlithography JOURNAL OF MACROMOLECULAR SCIENCE-PURE AND APPLIED CHEMISTRY, 2002, 39 (1-2): : 1 - 16
- [9] Optimization of anti-reflective coatings for lithography applications EMLC 2005: 21st European Mask and Lithography Conference, 2005, 5835 : 263 - 272
- [10] Wet developable bottom anti-reflective coatings ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XXI, PTS 1 AND 2, 2004, 5376 : 655 - 663