Nanorobotics and Automatic On-Wafer Probe Station with Nanometer Positionning Accuracy

被引：0

作者：

Mokhtari, Cerine ^{[1
]}

Seck, Daouda ^{[2
]}

Allal, Djamel ^{[2
]}

Lenoir, Clement ^{[1
]}

Sebbache, Mohamed ^{[1
]}

Berthe, Maxime ^{[1
]}

Haddadi, Kamel ^{[1
]}

机构：

[1] Univ Polytech Hauts France, Cent Lille, CNRS, Univ Lille,UMR 8520,IEMN, Lille, France

[2] Lab Natl Metrol & Essais, Paris, France

来源：

2023 IEEE MTT-S INTERNATIONAL CONFERENCE ON NUMERICAL ELECTROMAGNETIC AND MULTIPHYSICS MODELING AND OPTIMIZATION, NEMO | 2023年

关键词：

On-wafer measurements; extreme impedance measurement; ground-signal-ground (GSG) probes; calibration; vector network analyzer (VNA);

D O I：

10.1109/NEMO56117.2023.10202165

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Precise and repeatable radiofrequency (RF) measurements call for innovative characterization techniques. In particular, the use of nanorobotics for on-wafer measurements is a viable solution to address RF characterization with enhanced alignment accuracy. In this work, we present the development of a nanorobotics and automatic on-wafer probing station designed and realized for GSG on-wafer millimetre-wave measurements.

引用

页码：22 / 24

页数：3

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