Deposition of Superconducting Nb3Sn Coatings Using Multiple Magnetron Sputtering Techniques

被引：0

作者：

Yurjev, Yuriy ^{[1
]}

Savelev, Aleksandr ^{[1
]}

Yurjeva, Alena ^{[1
]}

Kazimirov, Artem ^{[2
]}

Kharisova, Anastasiia ^{[1
]}

机构：

[1] Tomsk Polytech Univ, BP Veinberg Res & Educ Ctr, 30 Lenina Av, Tomsk 634050, Russia

[2] Russian Acad Sci, E Zuev Inst Atmospher Opt, Siberian Branch, 1 Academician Zuev Sq, Tomsk 634055, Russia

来源：

METALS | 2023年 / 13卷 / 10期

基金：

俄罗斯科学基金会;

关键词：

magnetron sputtering; superconductivity; nb3sn; cavities; FABRICATION; RESISTANCE; FILMS;

D O I：

10.3390/met13101730

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper describes the elemental and phase composition, microstructure, and superconducting properties of Nb3Sn deposited by magnetron sputtering. The films were deposited on sapphire substrates using three different techniques: co-evaporation, layer-by-layer deposition of Nb and Sn, and sputtering of a stoichiometric Nb3Sn target. The influence of magnetron operation mode on the as-deposited film element composition is described. After high-temperature annealing at 700-900 degree celsius, the results indicate the formation of superconductive films. The highest critical temperature of 16.9 K was obtained for the film deposited at a stoichiometric Nb3Sn target and annealed at a temperature of 800 degree celsius for 12 h. These results could be used for superconducting radio-frequency applications.

引用

页数：12

共 50 条

[1] Superconductive Nb3Sn Coatings Synthesized for Charged-Particle Accelerators Using Magnetron Sputtering
Yu. N. Yurjev
Yu. S. Bordulev
A. E. Kharisova
T. V. Selezneva
A. I. Savelev
A. I. Kazimirov
Russian Physics Journal, 2023, 65 : 1996 - 2003
[2] Superconductive Nb3Sn Coatings Synthesized for Charged-Particle Accelerators Using Magnetron Sputtering
Yurjev, Yu. N.
Bordulev, Yu. S.
Kharisova, A. E.
Selezneva, T. V.
Savelev, A. I.
Kazimirov, A. I.
RUSSIAN PHYSICS JOURNAL, 2023, 65 (11) : 1996 - 2003
[3] Synthesis of superconducting Nb3Sn coatings on Nb substrates
Barzi, E.
Bestetti, M.
Reginato, F.
Turrioni, D.
Franz, S.
SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 2016, 29 (01):
[4] Structural and superconducting properties of Nb3Sn films grown by multilayer sequential magnetron sputtering
Sayeed, Md Nizam
Pudasaini, Uttar
Reece, Charles E.
Eremeev, Grigory
Elsayed-Ali, Hani E.
JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 800 : 272 - 278
[5] Deposition of superconducting Nb3Sn and high-purity Nb coatings on the rotor of a cryogenic gyroscope
V. N. Kolosov
A. A. Shevyrev
Inorganic Materials, 2012, 48 : 132 - 137
[6] Deposition of superconducting Nb3Sn and high-purity Nb coatings on the rotor of a cryogenic gyroscope
Kolosov, V. N.
Shevyrev, A. A.
INORGANIC MATERIALS, 2012, 48 (02) : 132 - 137
[7] Nb3Sn thin films made by RF magnetron sputtering process with a reacted Nb3Sn powder target
Agatsuma, K
Tateishi, H
Arai, K
Saitoh, T
Nakagawa, M
IEEE TRANSACTIONS ON MAGNETICS, 1996, 32 (04) : 2925 - 2928
[8] Zero-Current Deposition of Superconducting Nb3Sn Coatings from Molten Salts
V. N. Kolosov
V. Yu. Novichkov
Inorganic Materials, 2003, 39 : 485 - 491
[9] Zero-current deposition of superconducting Nb3Sn coatings from molten salts
Kolosov, VN
Novichkov, VY
INORGANIC MATERIALS, 2003, 39 (05) : 485 - 491
[10] Fabrication of superconducting Nb3Sn film by Co-sputtering
Sayeed, Md Nizam
Pudasaini, Uttar
Eremeev, Grigory, V
Elsayed-Ali, Hani E.
VACUUM, 2023, 212

← 1 2 3 4 5 →