[1] Shenzhen Polytech Univ, Inst Intelligent Mfg Technol, Shenzhen 518055, Peoples R China
[2] Wuhan Inst Technol, Hubei Key Lab Plasma Chem & Adv Mat, Sch Mat Sci & Engn, Wuhan 430205, Peoples R China
[3] Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Key Lab Funct Mat Elect Informat B, MOE, Wuhan 430074, Peoples R China
[4] Yantai Univ, Sch Environm & Mat Engn, Yantai 264005, Peoples R China
[5] Shenzhen Univ, Coll Mechatron & Control Engn, Dept Mech & Elect Engn, Shenzhen 518055, Peoples R China
[6] Southern Univ Sci & Technol, Coll Engn, Shenzhen 518055, Peoples R China
[7] Shenzhen Polytech Univ, Inst Crit Mat Integrated Circuits, Shenzhen 518055, Peoples R China
[8] Soochow Univ, Robot & Microsyst Ctr, Sch Mech & Elect Engn, Suzhou 215021, Peoples R China