Specifications and pre-production of n plus -in-p large-format strip sensors fabricated in 6-inch silicon wafers, ATLAS18, for the Inner Tracker of the ATLAS Detector for High-Luminosity Large Hadron Collider

被引：16

作者：

Unno, Y. ^{[6
]}

Abidi, H. ^{[11
]}

Affolder, A. ^{[9
]}

Affolder, K. ^{[9
]}

Allport, P. P. ^{[1
]}

Beaupre, S. ^{[10
,12
]}

Beck, G. A. ^{[8
]}

Bernabeu, J. ^{[5
]}

Bevan, A. J. ^{[8
]}

Chisholm, A. ^{[1
]}

Ciungu, B. ^{[11
]}

Dawson, I ^{[8
]}

Dowling, A. ^{[9
]}

Fadeyev, V. ^{[9
]}

Federicova, P. ^{[7
]}

Fernandez-Tejero, J. ^{[10
,12
]}

Fleta, C. ^{[4
]}

Fournier, A. ^{[10
]}

George, W. ^{[1
]}

Gignac, M. ^{[9
]}

Gonella, L. ^{[1
]}

Greig, G. ^{[10
,12
]}

Gunnell, J. ^{[9
]}

Hara, K. ^{[13
]}

Hirose, S. ^{[13
]}

Hommels, B. ^{[2
]}

Ishii, T. ^{[13
]}

Jessiman, C. ^{[3
]}

Johnson, J. ^{[9
]}

Jones, D. ^{[2
]}

Kachiguin, S. ^{[9
]}

Kang, N. ^{[9
]}

Keller, J. ^{[3
]}

Klein, C. ^{[3
]}

Koffas, T. ^{[3
]}

Kopsalis, I. ^{[1
]}

Kroll, J. ^{[7
]}

Kvasnicka, J. ^{[7
]}

Lacasta, C. ^{[5
]}

Latonova, V. ^{[7
]}

Lomas, J. ^{[1
]}

Martinez-Mckinney, F. ^{[9
]}

Mikestikova, M. ^{[7
]}

Miyagawa, P. S. ^{[8
]}

Orr, R. S. ^{[11
]}

Poley, L. ^{[10
]}

Rousso, D. ^{[2
]}

Shah, A. ^{[8
]}

Solaz, C. ^{[5
]}

Soldevila, U. ^{[5
]}

机构：

[1] Univ Birmingham, Sch Phys & Astron, Birmingham B152TT, England

[2] Univ Cambridge, Cavendish Lab, JJ Thomson Ave, Cambridge CB3 0HE, England

[3] Carleton Univ, Phys Dept, 1125 Colonel Dr, Ottawa, ON K1S 5B6, Canada

[4] CSIC, Inst Microelect Barcelona IMB, CNM, Campus UAB Bellaterra, Barcelona 08193, Spain

[5] CSIC UV, Inst Fis Corpuscular, IFIC, C Catedrat Jose Beltran 2, E-46980 Valencia, Spain

[6] High Energy Accelerator Res Org KEK, Inst Particle & Nucl Study, 1-1 Oho, Tsukuba, Ibaraki 3050801, Japan

[7] Acad Sci Czech Republ, Inst Phys, Slovance 2, Prague 8, Czech Republic

[8] Queen Mary Univ London, Dept Phys & Astron, London E1 4NS, England

[9] Univ Calif Santa Cruz, St Cruz Inst Particle Phys SCIPP, Santa Cruz, CA 95064 USA

[10] Simon Fraser Univ, Dept Phys, 8888 Univ Dr, Burnaby, BC V5A 1S6, Canada

[11] Univ Toronto, Dept Phys, 60 St George St, Toronto, ON V5A 1S6, Canada

[12] TRIUMF, 4004 Wesbrook Mall, Vancouver, BC V6T 2A3, Canada

[13] Univ Tsukuba, Inst Pure & Appl Sci, 1-1-1 Tennodai, Tsukuba, Ibaraki 3058571, Japan

来源：

JOURNAL OF INSTRUMENTATION | 2023年 / 18卷 / 03期

基金：

加拿大创新基金会;

关键词：

Particle tracking detectors (Solid-state detectors); Radiation-hard detectors; Si microstrip and pad detectors; MICROSTRIP SENSORS; DESIGN;

D O I：

10.1088/1748-0221/18/03/T03008

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The ATLAS experiment is constructing new all-silicon inner tracking system for HL-LHC. The strip detectors cover the radial extent of 40 to 100 cm. A new approach is adopted to use p-type silicon material, making the readout in n+-strips, so-called n+-in-p sensors. This allows for enhanced radiation tolerance against an order of magnitude higher particle fluence compared to the LHC. To cope with varying hit rates and occupancies as a function of radial distance, there are two barrel sensor types, the short strips (SS) for the inner 2 and the long strips (LS) for the outer 2 barrel cylinders, respectively. The barrel sensors exhibit a square, 9.8 x 9.8 cm2, geometry, the largest possible sensor area from a 6-inch wafer. The strips are laid out in parallel with a strip pitch of 75.5 mu m and 4 or 2 rows of strip segments. The strips are AC-coupled and biased via polysilicon resistors. The endcap sensors employ a "stereo-annulus" geometry exhibiting a skewed-trapezoid shapes with circular edges. They are designed in 6 unique shapes, R0 to R5, corresponding to progressively increasing radial extents and which allows them to fit within the petal geometry and the 6-inch wafer maximally. The strips are in fan-out geometry with an in-built rotation angle, with a mean pitch of approximately 75 mu m and 4 or 2 rows of strip segments. The eight sensor types are labeled as ATLAS18xx where xx stands for SS, LS, and R0 to R5. According to the mechanical and electrical specifications, CAD files for wafer processing were laid out, following the successful designs of prototype barrel and endcap sensors, together with a number of optimizations. A pre-production was carried out prior to the full production of the wafers. The quality of the sensors is reviewed and judged excellent through the test results carried out by vendor. These sensors are used for establishing acceptance procedures and to evaluate their performance in the ATLAS collaboration, and subsequently for pre-production of strip modules and stave and petal structures.

引用

页数：29