Recent Progress in III-V Photodetectors Grown on Silicon

被引:13
|
作者
Zeng, Cong [1 ]
Fu, Donghui [1 ]
Jin, Yunjiang [1 ]
Han, Yu [1 ]
机构
[1] Sun Yat Sen Univ, Sch Elect & Informat Technol, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Peoples R China
基金
中国国家自然科学基金;
关键词
Si photonics; III-V photodetector; blanket heteroepitaxy; selective heteroepitaxy; QUANTUM-DOT LASERS; LOW DARK CURRENT; SEMICONDUCTOR-METAL PHOTODETECTORS; MOLECULAR-BEAM EPITAXY; HIGH-SPEED; AVALANCHE PHOTODIODES; ON-CHIP; SI; PERFORMANCE; GAAS;
D O I
10.3390/photonics10050573
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An efficient photodetector (PD) is a key component in silicon-based photonic integrated circuits (PICs). III-V PDs with low dark current density, large bandwidth, and wide operation wavelength range have become increasingly important for Si photonics in various applications. Monolithic integration of III-V PDs on Si by direct heteroepitaxy exhibits the lowest cost, the largest integration density, and the highest throughput. As the research of integrating III-V lasers on Si flourishes in the last decade, various types of III-V PDs on Si with different device structures and absorption materials have also been developed. While the integration of III-V lasers on Si using various technologies has been systematically reviewed, there are few reviews of integrating III-V PDs on Si. In this article, we review the most recent advances in III-V PDs directly grown on Si using two different epitaxial techniques: blanket heteroepitaxy and selective heteroepitaxy.
引用
收藏
页数:26
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