A Novel Eddy Current Sensor for Displacement Measurement With High Accuracy and Long Range

被引:3
|
作者
Tong, Peng [1 ]
Wu, Liang [1 ]
Yanchen, A. [1 ]
Su, Rui [1 ]
Wu, Yulong [1 ]
机构
[1] Chongqing Univ Technol, Engn Res Ctr Mech Testing Technol Equipment, Minist Educ, Chongqing 400054, Peoples R China
基金
中国国家自然科学基金;
关键词
Sensors; Coils; Eddy currents; Current measurement; Magnetic field measurement; Displacement measurement; Metals; Absolute position measurement; eddy current effect; inductive sensor; spiral coils; OPTICAL ENCODER; HIGH-PRECISION; SYSTEM;
D O I
10.1109/JSEN.2023.3266564
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
To enlarge the measurement range of traditional eddy current displacement sensors, a novel eddy current linear sensor for displacement measurement with high accuracy and long range is proposed in this article. The sensor consists of a stationary component with metal reflection conductors and a movable component with spiral coils. The metal reflection conductors below the movable component will generate an eddy current and radiate an eddy current magnetic field after the high-frequency alternating excitation signal is applied to field spiral coils. The inductive electromotive forces (EMFs) will be generated in inductive spiral coils. The measurement of displacement relies on the inductive EMFs variation of inductive spiral coils caused by the change of coupling areas between the spiral coils and the metal reflection conductors. The absolute positioning is realized by the combination of a coarse measurement channel and a fine measurement channel. The structure and measurement principle are described in detail. A sensor prototype is fabricated by printed circuit board (PCB) technology, and the experiments are carried out. Based on the experimental results, some error sources are analyzed and the sensor is optimized. The experimental results show that the sensor can achieve absolute positioning, and the worst-case error is 6.75 mu m within the measurement range of 500 mm.
引用
收藏
页码:12066 / 12075
页数:10
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