An ultra-high vacuum system for fabricating clean two-dimensional material devices

被引：4

作者：

Guo, Shuaifei ^{[1
,2
,3
,4
,5
]}

Luo, Mingyan ^{[1
,2
,3
,4
,5
]}

Shi, Gang ^{[6
]}

Tian, Ning ^{[1
,2
,3
,4
,5
]}

Huang, Zhe ^{[7
]}

Yang, Fangyuan ^{[1
]}

Ma, Liguo ^{[1
]}

Wang, Nai Zhou ^{[8
,9
,10
]}

Shi, Qinzhen ^{[11
]}

Xu, Kailiang ^{[11
,12
]}

Xu, Zihan ^{[13
]}

Watanabe, Kenji ^{[14
]}

Taniguchi, Takashi

Chen, Xian Hui ^{[8
,9
,10
]}

Shen, Dawei ^{[7
]}

Zhang, Liyuan ^{[6
]}

Ruan, Wei ^{[1
,3
,4
,5
]}

Zhang, Yuanbo ^{[1
,2
,3
,4
,5
]}

机构：

[1] Fudan Univ, Dept Phys, State Key Lab Surface Phys, Shanghai 200438, Peoples R China

[2] Shanghai Qi Zhi Inst, Shanghai 200232, Peoples R China

[3] Shanghai Res Ctr Quantum Sci, Shanghai 201315, Peoples R China

[4] Fudan Univ, Inst Nanoelect Devices & Quantum Comp, Shanghai 200433, Peoples R China

[5] Fudan Univ, Zhangjiang Fudan Int Innovat Ctr, Shanghai 201210, Peoples R China

[6] Southern Univ Sci & Technol, Dept Phys, Shenzhen 518055, Peoples R China

[7] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol SIMIT, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China

[8] Univ Sci & Technol China, Hefei Natl Lab Phys Sci Microscale, Hefei 230026, Anhui, Peoples R China

[9] Univ Sci & Technol China, Dept Phys, Hefei 230026, Anhui, Peoples R China

[10] Univ Sci & Technol China, Key Lab Strongly Coupled Quantum Matter Phys, 1-1 Namiki, Hefei 230026, Anhui, Peoples R China

[11] Fudan Univ, Ctr Biomed Engn, Shanghai 200438, Peoples R China

[12] Fudan Univ, Acad Engn & Technol, Shanghai, Peoples R China

[13] SixCarbon Technol, Youmagang Ind Pk, Shenzhen 518106, Peoples R China

[14] Natl Inst Mat Sci, Res Ctr Funct Mat, 1-1 Namiki, Tsukuba 3050044, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2023年 / 94卷 / 01期

基金：

国家重点研发计划; 美国国家科学基金会;

关键词：

BLACK PHOSPHORUS; GRAPHENE; EXFOLIATION; SUPERCONDUCTIVITY; HETEROSTRUCTURES;

D O I：

10.1063/5.0110875

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

High mobility electron gases confined at material interfaces have been a venue for major discoveries in condensed matter physics. Ultra-high vacuum (UHV) technologies played a key role in creating such high-quality interfaces. The advent of two-dimensional (2D) materials brought new opportunities to explore exotic physics in flat lands. UHV technologies may once again revolutionize research in low dimensions by facilitating the construction of ultra-clean interfaces with a wide variety of 2D materials. Here, we describe the design and operation of a UHV 2D material device fabrication system, in which the entire fabrication process is performed under pressure lower than 5 x 10(-10) mbar. Specifically, the UHV system enables the exfoliation of atomically clean 2D materials. Subsequent in situ assembly of van der Waals heterostructures produces high-quality interfaces that are free of contamination. We demonstrate functionalities of this system through exemplary fabrication of various 2D materials and their heterostructures.

引用

页数：10

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