Perspective on ultrashort pulse laser micromachining

被引：3
|
作者：
Tuennermann, Andreas [1 ,3 ]
Momma, Carsten [2 ]
Nolte, Stefan [1 ,3 ]
机构：
[1] Friedrich Schiller Univ Jena, Inst Appl Phys, Abbe Ctr Photon, Albert Einstein Str 15, D-07745 Jena, Germany
[2] Cortronik GmbH, Friedrich Barnewitz Str 4a, D-18119 Rostock, Germany
[3] Fraunhofer Inst Appl Opt & Precis Engn IOF, Ctr Excellence Photon, Albert Einstein Str 7, D-07745 Jena, Germany
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2023年 / 129卷 / 02期
关键词：
Ultrashort pulse laser; Materials processing; Micromachining; Ablation; ABLATION; FEMTOSECOND; BURSTS;
D O I：
10.1007/s00339-023-06403-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Ultrashort pulse lasers have found widespread applications in precise micromachining. Here, we present our brief perspective on the development of this innovative technology from the 1990s until today.
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收藏
页数：3
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