[1] Jilin Univ, Sch Mech & Aerosp Engn, Micro Engn & Micro Syst Lab JML, Changchun 130025, Peoples R China
[2] Sichuan Univ, Sch Mech Engn, Chengdu 610065, Peoples R China
[3] Natl Inst Adv Ind Sci & Technol, Res Ctr Ubiquitous MEMS & Micro Engn, Tsukuba 3058564, Japan