A Mass-Position Sensing Scheme Using a Geometrically Adjustable Resonator With Low-Order Modals for Detecting Multiple Analytes

被引:0
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作者
Xiao, Mingkai [1 ]
Xia, Cao [2 ]
Wang, Dong F. [1 ,3 ]
机构
[1] Jilin Univ, Sch Mech & Aerosp Engn, Micro Engn & Micro Syst Lab JML, Changchun 130025, Peoples R China
[2] Sichuan Univ, Sch Mech Engn, Chengdu 610065, Peoples R China
[3] Natl Inst Adv Ind Sci & Technol, Res Ctr Ubiquitous MEMS & Micro Engn, Tsukuba 3058564, Japan
基金
中国国家自然科学基金;
关键词
Geometrically adjustable single resonator; low-order modals; mass-position detection accuracy; mass-position synchronous sensing scheme; multiple analytes; COUPLED DUCTILE CANTILEVERS; SINGLE CELLS;
D O I
10.1109/TIM.2023.3300454
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Mechanical resonators are widely used to detect small quantities of adsorbed single mass without position information through shifts in oscillation frequency while there have been always facing with urgent needs and severe challenges around synchronously sensing mass and position of multiple analytes. A mass-position synchronous sensing scheme is therefore proposed using a length-adjustable single cantilever with low-order modes (i.e., the first two ones) for multiple analytes in this article. A theoretical expression is derived to elucidate the relationship between mass and position of multiple spheres and modal frequencies of the cantilever with different lengths, and a corresponding algorithm is programed to synchronously sense mass and position of multiple spheres. Compared to that of the multimodal one (i.e., more than three), the position detection error of the proposed scheme is decreased to about 50% and 47 % in the cases of two and three spheres, respectively. The number of detectable spheres is unlimited by changing modal frequencies with adjusting cantilever length in the proposed scheme while that is limited by the measurable modes in the multimodal one. It is observed that the mass-position detection accuracy is improved by enlarging the interval among the adsorbable positions both in analytical and experimental studies.
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页数:12
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