Effect of Young's modulus on fracture characteristics of SiCO-SiCN multi-layer films by XFEM simulations of nano-indentation

In this work, extended finite elements models of SiCN/SiCO/SiCN/PEOX multi-films composites with various Young's modulus of SiCO are established, and their interfacial mechanical behaviors are investigated and predicted by simulating nano-indentation process. The aim of this study is to establish a numerical approach for evaluating the fracture properties of multi-layer system. An interfacial layer model is proposed to improve the description of interfacial mechanical behaviors, and the corresponding load displacement relationship better match to experimental results than those of models without an interfacial layer. The calculated effective hardnesses, stresses, Young's moduli and energy release rates increase with an increasing of Young's modulus of SiCO layer, showing significant influence of SiCO layer on the mechanical properties of the multi-layer system.