Crack-free high-aspect ratio holes in glasses by top-down percussion drilling with infrared femtosecond laser GHz-bursts

被引：21
|
作者：
Balage, Pierre [1 ]
Lopez, John [1 ]
Bonamis, Guillaume [2 ]
Honninger, Clemens [2 ]
Manek-Honninger, Inka [1 ]
机构：
[1] Univ Bordeaux, CNRS CEA, CELIA UMR 5107, F-33405 Talence, France
[2] Amplitude, 11 Ave Canteranne, F-33600 Pessac, France
来源：
INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING | 2023年 / 5卷 / 01期
关键词：
femtosecond laser; glass; GHz-bursts; percussion drilling; ABLATION; MHZ; FS;
D O I：
10.1088/2631-7990/acaa14
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report novel results on top-down percussion drilling in different glasses with femtosecond laser GHz-bursts. Thanks to this particular regime of light-matter interaction, combining non-linear absorption and thermal cumulative effects, we obtained crack-free holes of aspect ratios exceeding 30 in sodalime and 70 in fused silica. The results are discussed in terms of inner wall morphology, aspect ratio and drilling speed.
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页数：8
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