Low-Frequency and Random Telegraph Noise in 14-nm Bulk Si Charge-Trap Transistors

被引：2

作者：

Gorchichko, Mariia ^{[1
,2
]}

Zhang, En Xia ^{[3
]}

Reaz, Mahmud ^{[1
,4
]}

Li, Kan ^{[1
,5
]}

Wang, Peng Fei ^{[1
,6
]}

Cao, Jingchen ^{[1
,7
]}

Brewer, Rachel M. ^{[1
,8
]}

Schrimpf, Ronald D. ^{[3
]}

Reed, Robert A. ^{[3
]}

Sierawski, Brian D. ^{[3
]}

Alles, Michael L. ^{[3
]}

Cox, Jonathan ^{[9
]}

Moran, Steven L.

Iyer, Subramanian S.

Fleetwood, Daniel M. ^{[3
]}

机构：

[1] Vanderbilt Univ, Dept Elect Engn & Comp Sci, Nashville, TN 37212 USA

[2] Appl Mat Inc, Santa Clara, CA 95054 USA

[3] Vanderbilt Univ, Dept Elect & Comp Engn, Nashville, TN 37235 USA

[4] Microchip Technol Inc, San Jose, CA 95014 USA

[5] HUAWEI, Shenzhen 518129, Guangdong, Peoples R China

[6] Western Digital, Milpitas, CA 95035 USA

[7] Intel Corp, Folsom, CA 95630 USA

[8] Lockheed Martin Space, Huntsville, AL 35805 USA

[9] Univ Calif Los Angeles, Elect & Comp Engn Dept, Los Angeles, CA 90095 USA

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2023年 / 70卷 / 06期

关键词：

1/f noise; charge trap transistor (CTT); defects; finFET; HfO2; low-frequency noise (LFN); random telegraph noise (RTN); random telegraph signal (RTS); total-ionizing dose (TID); 14 NM FINFET; 1/F NOISE; BORDER TRAPS; BIAS DEPENDENCE; FLICKER NOISE; GATE-LENGTH; OXIDE TRAPS; MOS; DEFECTS; IMPACT;

D O I：

10.1109/TED.2023.3265939

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Effects of programming/erasing (P/E) and total-ionizing dose (TID) are investigated on 2-and 40-fin charge-trap transistors (CTTs) fabricated in a 14-nm bulk-Si CMOS technology. Significant random telegraph noise (RTN) is observed in as-processed CTTs, especially for 2-fin devices. Trapped charge in programed devices does not significantly affect 1/f noise magnitudes, but P/E leads to trap activation/deactivation, causing changes in border-trap energy and spatial distributions. TID irradiation acti-vates a large number of stable radiation-induced traps.

引用

页码：3215 / 3222

页数：8

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