Design of a wide bandwidth terahertz MEMS Ohmic switch for 6G communication applications

With the new arena of smart and Internet of things (IoT) enabled devices, a terahertz frequency-based network like 6G with high speed and low latency is required. Solid-state devices show good response till 5 GHz. However, at higher frequencies, the electromagnetic responses of these devices start to degrade. On the other hand, RF MEMS technology is matured, and devices until 30 GHz have been demonstrated. The present paper shows the advancement of RF MEMS to a new terahertz MEMS switch for 6G communication applications. The terahertz switch has an actuation voltage of 20 V with a mechanical frequency of 138.9 kHz. MEMS terahertz switch's most important factor is its high-frequency linearity. A single switch can handle all the communication bands like 2G, 3G, 4G, 5G and 6G to 150 GHz frequency. Insertion loss is less than - 0.18 dB, and isolation is more than - 20 dB from DC to 150 GHz frequency. The return loss of the switch is also better than - 23 dB for the same band.