Reliability Analysis of Thermally Actuated MEMS Micromirror

被引：0
|
作者：
Maharshi, Vikram [1 ]
Agarwal, Ajay [2 ]
机构：
[1] Indian Inst Technol, Delhi, India
[2] Indian Inst Technol, Jodhpur, Rajasthan, India
来源：
MICRO AND NANOELECTRONICS DEVICES, CIRCUITS AND SYSTEMS | 2023年 / 904卷
关键词：
MEMS; Reliability; Micromirror; Bathtub curve; Fatigue; Actuator; Bimorph;
D O I：
10.1007/978-981-19-2308-1_43
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a reliability analysis of thermally actuated MEMS micromirror devices. The various factors affecting the reliability of the MEMS micromirror device were analyzed and discussed. The reliability distribution function and lifetime of the MEMS micromirror were analyzed. The series and parallel model reliability model for MEMS micromirror were reported. The p-out-of-n redundancy model was considered to increase reliability for the MEMS micromirror device. This model gives more redundancy to it, and the failure of one or more devices does not affect the system performance.
引用
收藏
页码：427 / 436
页数：10
相关论文
共 50 条
  • [1] Thermally actuated piston micromirror arrays
    Cowan, WD
    Bright, VM
    [J]. OPTICAL SCANNING SYSTEMS: DESIGN AND APPLICATIONS, 1997, 3131 : 260 - 271
  • [2] Reliability of a thermally actuated MEMS VOA for optical component applications
    Hickey, R
    Mallard, R
    Wylde, J
    Shepperd, T
    Panton, J
    [J]. RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS IV, 2005, 5716 : 103 - 112
  • [3] Reliability Design of Thermally Actuated MEMS switches supported by V -Beams
    Pustan, Marius
    Chiorean, Radu
    Birleanu, Corina
    Dudescu, Cristian
    Muller, Raluca
    Baracu, Angela
    Voicu, Rodica
    [J]. 2015 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP), 2015,
  • [4] Hexagon MEMS micromirror actuated by electrostatic repulsive force
    Hu, Fang-Rong
    Wang, Ai-Na
    Qiu, Chuan-Kai
    Yao, Jun
    [J]. Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering, 2010, 8 (02): : 171 - 176
  • [5] Design of a MEMS micromirror actuated by electrostatic repulsive force
    Hu, Fangrong
    Tang, Yalu
    Qian, Yixian
    [J]. OPTIK, 2012, 123 (05): : 387 - 390
  • [6] MEMS Dual-mode Electrostatically Actuated Micromirror
    Xiong, Xingguo
    Xie, Hanyu
    [J]. 2014 ZONE 1 CONFERENCE OF THE AMERICAN SOCIETY FOR ENGINEERING EDUCATION (ASEE ZONE 1), 2014,
  • [7] Design and performance analysis of thermally actuated MEMS circuit breakers
    Yeatman, EM
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (07) : S109 - S115
  • [8] Thermally actuated MEMS optical devices
    Sinclair, MJ
    [J]. IEEE/LEOS Optical MEMs 2005: International Conference on Optical MEMs and Their Applications, 2005, : 7 - 8
  • [9] Novel method to improve stroke of electrostatically actuated MEMS micromirror
    Aryal, Niwit
    Emadi, Arezoo
    [J]. ODS 2019: INDUSTRIAL OPTICAL DEVICES AND SYSTEMS, 2019, 11125
  • [10] Reliability design of thermally actuated MEMS switches based on V-shape beams
    Pustan, Marius
    Chiorean, Radu
    Birleanu, Corina
    Dudescu, Cristian
    Muller, Raluca
    Baracu, Angela
    Voicu, Rodica
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017, 23 (09): : 3863 - 3871
12345