Development of a novel fast tool servo using topology optimization

Micro/nanostructured surfaces have wide applications in optics, electronics, and aerospace. However, the cur-rent fast tool servo (FTS) cannot satisfy the large demand for micro/nanostructured surfaces in the industry, because their low working frequency influences the machining efficiency. To solve this problem, this paper develops a novel FTS with the high working frequency. To improve the working frequency, a topology opti-mization algorithm is proposed to design its mechanical structure. Then, the numerical models of the FTS, including the input stiffness, amplification ratio, natural frequency, and maximum stress, are established to analyze its specifications. Performance tests show that the stroke and maximal working frequency of the developed FTS are 15 mu m and 1250 Hz, demonstrating superior performance. Besides, to improve motion ac-curacy, a closed-loop control system is designed based on the proportional-integral controller and feed-forward compensation methods. Experimental results show that errors of motion trajectories in three cases are lower than +/- 50 nm, demonstrating the ultrahigh motion accuracy of the developed FTS. Therefore, this research develops a new FTS, which not only has a high working frequency but also has an ultrahigh motion accuracy.