Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

被引:0
|
作者
Ren, Yingying [1 ,2 ,3 ,4 ,5 ]
Guo, Kaishun [1 ,2 ]
Li, Yu [1 ,2 ]
An, Peng [1 ,2 ]
Luo, Shenglin [1 ,2 ]
Tan, Yuanxin [1 ,2 ,3 ,4 ,5 ]
Liu, Hongliang [6 ]
Cai, Yangjian [1 ,2 ,3 ,4 ,5 ]
Huo, Yanyan [1 ,2 ]
机构
[1] Shandong Normal Univ, Shandong Prov Engn & Tech Ctr Light Manipulat, Sch Phys & Elect, Jinan 250014, Peoples R China
[2] Shandong Normal Univ, Sch Phys & Elect, Shandong Prov Key Lab Opt & Photon Device, Jinan 250014, Peoples R China
[3] Shandong Normal Univ, Collaborat Innovat Ctr Light Manipulat & Applicat, Jinan 250358, Peoples R China
[4] East China Normal Univ, Joint Res Ctr Light Manipulat Sci & Photon Integra, Shanghai 200241, Peoples R China
[5] East China Normal Univ, Shandong Normal Univ, Shanghai 200241, Peoples R China
[6] Nankai Univ, Inst Modern Opt, Key Lab Opt Informat Sci & Technol, Minist Educ, Tianjin 300071, Peoples R China
基金
中国国家自然科学基金;
关键词
Femtosecond laser irradiation; Periodic surface structure; Crystal; Enhanced antireflection; ABLATION; DIAMOND;
D O I
10.1016/j.vacuum.2023.112900
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In the research field of laser induced periodic surface structures (LIPSSs), the ones located at the superficial surface of the solid materials (s-LIPSSs) induced by femtosecond laser have been widely investigated. It is noticed that, the formation of s-LIPSSs is limited to a relatively narrow parameter window and, as the parameters are tailored, such structures would evolve into novel topographies which possess laser-ablated micro-grooves with LIPSSs being deeply located at the groove-bottoms (d-LIPSSs). In this work, both s-LIPSSs and d-LIPSSs are produced on the surface of Nd:LGGG crystal by using femtosecond laser irradiation. Experimental investigations and numerical modeling convince the crucial role of surface plasmon polariton excitation in the formation of both structures. The evolution of surface topographies and the dependence of LIPSSs-periods on the fabricating parameters can be mainly ascribed to the feedback mechanisms of s-LIPSSs and laser-induced micro-grooves. Furthermore, based on the d-LIPSSs, a novel approach is proposed to fabricate 2-dimensional surface with orthogonal dual-periods. Such structure shows enhanced polarization-sensitive antireflectivity within long wavelength range and the ability for NIR detection, which is superior to the traditional surface structure composed of s-LIPSSs.
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页数:11
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