Techniques for mass production of large-sized GEM foil by the Korean CMS group for CMS phase-2 upgrade

被引:0
|
作者
Yoon, I. [1 ]
机构
[1] Seoul Natl Univ, Res Inst Basic Sci, 1 Gwanak Ro, Seoul 08826, South Korea
来源
JOURNAL OF INSTRUMENTATION | 2023年 / 18卷 / 06期
关键词
Electron multipliers (gas); Gaseous detectors; Micropattern gaseous detectors (MSGC; GEM; THGEM; RETHGEM; MHSP; MICROPIC; MICROMEGAS; InGrid; etc);
D O I
10.1088/1748-0221/18/06/C06010
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
This study presents techniques for the mass production of large-sized GEM foils for the CMS phase-2 upgrade by the Korean CMS group. The foil production facility is designed with a focus on mass production, including the adoption of the double-mask technique. A polyimide wet etching technology that uses mono ethanolamine is reported, providing a safer working environment due to its lower inhalation toxicity compared to ethylene diamine. The study also covers the denaturation of the etchant over time and the process of retuning. Finally, R & D results on soldering surface mount resistors with hot air for faster production are discussed.
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页数:5
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