Dry Etching Fabrication for Ring Vibration Resonator Based on Quartz

Gyroscopes are widely used for attitude measurement and navigation of drones and vehicles. MEMS gyroscopes have attracted many attentions due to its advantages of small volume, light weight and low cost. Fused silica has high quality factor and thermal stability compared with single crystal silicon. However, compared with silicon, fused silica is much more difficult to process. Herein, we demonstrate dry etching fabrication method for two types of ring vibration oscillator based on quartz. Chemistry and RF power were tuned in the recipe of the plasma etching to fabricate the quartz ring structures. Both simulation and testing results of the quartz ring structures show that it is promising in the application of MEMS devices, such as high performance gyroscope resonator.