Rapid growth of nanostructure on tungsten thin film by exposure to helium plasma

被引:0
|
作者
Shuangyuan FENG [1 ]
Shin KAJITA [2 ]
Masayuki TOKITANI [1 ]
Daisuke NAGATA [1 ]
Noriyasu OHNO [3 ]
机构
[1] National Institute for Fusion Science, National Institutes of Natural Sciences
[2] Graduate School of Frontier Sciences, The University of Tokyo
[3] Graduate School of Engineering, Nagoya University
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中图分类号
TB383.1 []; TL627 [];
学科分类号
070205 ; 080501 ; 082701 ; 1406 ;
摘要
A fiberform nanostructure was synthesized by exposing high-density helium plasma to a 100 nm thick tungsten thin film in the linear plasma device NAGDIS-II. After helium plasma exposure,the cross-section of samples was observed by a scanning electron microscope, transmission electron microscope, and focused ion beam scanning electron microscope. It is shown that the thickness of the nanostructured layer increases significantly for only a short irradiation time. The optical absorptivity remains high, even though it is exposed to helium plasma for a short time.The usage of the thin film can shorten the processing time for nanostructure growth, which will be beneficial for commercial production.
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页码:4 / 7
页数:4
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