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Rapid growth of nanostructure on tungsten thin film by exposure to helium plasma
被引:0
|作者:
Shuangyuan FENG
[1
]
Shin KAJITA
[2
]
Masayuki TOKITANI
[1
]
Daisuke NAGATA
[1
]
Noriyasu OHNO
[3
]
机构:
[1] National Institute for Fusion Science, National Institutes of Natural Sciences
[2] Graduate School of Frontier Sciences, The University of Tokyo
[3] Graduate School of Engineering, Nagoya University
关键词:
D O I:
暂无
中图分类号:
TB383.1 [];
TL627 [];
学科分类号:
070205 ;
080501 ;
082701 ;
1406 ;
摘要:
A fiberform nanostructure was synthesized by exposing high-density helium plasma to a 100 nm thick tungsten thin film in the linear plasma device NAGDIS-II. After helium plasma exposure,the cross-section of samples was observed by a scanning electron microscope, transmission electron microscope, and focused ion beam scanning electron microscope. It is shown that the thickness of the nanostructured layer increases significantly for only a short irradiation time. The optical absorptivity remains high, even though it is exposed to helium plasma for a short time.The usage of the thin film can shorten the processing time for nanostructure growth, which will be beneficial for commercial production.
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页码:4 / 7
页数:4
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