SURFACE ANALYSES OF NITROGEN ION IMPLANTED Ti6Ai4V ALLOY

The techniques for surface analysis including AES,XPS and SIMS were employed to studythe chemical composition and bond valence of nitrogen ion implanted surface of surgicalimplantation service alloy Ti6Al4V.The depth of implanted nitrogen ions and the sputteringrate of argon beams were determined using a profilometer.It was found that the combinationof injected nitrogen ions with titanium resulted in the formation of hard TiN particles and theprofile of nitrogen concentration approximately displayed gaussian distribution.The totaldepth of implanted nitrogen is about 350 nm and its maximum concentration appears in thedepth of about 140 nm from the surface,in which the concentration ratio of nitrogen totitanium may be up to 1.1.