Advances in Waste Gas Treatment Technology in Semiconductor,PV and LED Industries

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Advances in Waste Gas Treatment Technology in Semiconductor; PV and LED Industries; PFC; PV; down; LED; CVD;
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中图分类号
X701 [废气的处理与利用]; F426.6 [];
学科分类号
0202 ; 020205 ; 083002 ;
摘要
Waste gas treatment isan often overlooked but essential component of a manufacturing process.Historically several serious accidents have occurred in factories where no abatement was installed,but still today gas treatment is often looked at,as a cost rather than safety issue.There are three main reasons why gas treatment is installed in factory:health and safety,
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页码:980 / 980
页数:1
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