Image boundary extraction based on island model genetic algorithms for integrated circuit defect detection

被引：0
|
作者：
PAN Zhong-liang
机构：
来源：
重庆邮电大学学报(自然科学版) | 2009年 / 02期
关键词：
integrated circuit; wafer; defect detection; image processing; genetic algorithms;
D O I：
暂无
中图分类号：
TN407 [测试和检验];
学科分类号：
080903 ; 1401 ;
摘要：
The integrated circuit chip with high performance has a high sensitivity to the defects in manufacturing environments.When there are defects on a wafer,the defects may lead to the degradation of chip performance.It is necessary to design effective detection approaches for the defects in order to ensure the reliability of wafer.In this paper,a new method based on image boundary extraction is presented for the detection of defects on a wafer.The method uses island model genetic algorithms to perform the segmentation of wafer images,and gets the optimal threshold values.The island model genetic algorithm uses two distinct subpopulations,it is a coarse grain parallel model.The individuals migration can occur between the two subpopulations to share genetic materials.A lot of experimental results show that the defect detection method proposed in this paper can obtain the features of defects effectively.
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页码：207 / 211
页数：5
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