A high-efficiency high-power evanescently coupled UTC-photodiode

被引：0

作者：

张云霄 ^{[1
]}

廖载宜 ^{[1
]}

赵玲娟 ^{[1
]}

朱洪亮 ^{[1
]}

潘教青 ^{[1
]}

王圩 ^{[1
]}

机构：

[1] Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Science

来源：

Journal of Semiconductors | 2009年 / 04期

基金：

国家高技术研究发展计划(863计划);

关键词：

EC-UTC-PD; multimode diluted waveguide; space-charge effect; thermal effect;

D O I：

暂无

中图分类号：

TN32 [半导体三极管（晶体管）];

学科分类号：

0805 ; 080501 ; 080502 ; 080903 ;

摘要：

The effects of the multimode diluted waveguide on quantum efficiency and saturation behavior of the evanescently coupled uni-traveling carrier (UTC) photodiode structures are reported. Two kinds of evanescently coupled uni-traveling carrier photodiodes (EC-UTC-PD) were designed and characterized: one is a conventional EC-UTC-PD structure with a multimode diluted waveguide integrated with a UTC-PD; and the other is a compact EC-UTC-PD structure which fused the multimode diluted waveguide and the UTC-PD structure together. The effect of the absorption behavior of the photodiodes on the efficiency and saturation characteristics of the EC-UTC-PDs is analyzed using 3-D beam propagation method, and the results indicate that both the responsivity and saturation power of the compact EC-UTC-PD structures can be further improved by incorporating an optimized compact multimode diluted waveguide.

引用

页码：52 / 55

页数：4