Preparation,structure and ferromagnetic properties of the nanocrystalline Ti1-xMnxO2 thin films grown by radio frequency magnetron co-sputtering

This paper reported that the Mn-doped TiO2 films were prepared by radio frequency(RF) magnetron cosputtering.X-ray diffraction measurements indicate that the samples are easy to form the rutile structure,and the sizes of the crystal grains grow big and big as the Mn concentration increases.X-ray photoemission spectroscopy measurements and high resolution transmission electron microscope photographs confirm that the manganese ions have been effectively doped into the TiO 2 crystal when the Mn concentration is lower than 21%.The magnetic property measurements show that the Ti1-xMnxO2(x=0.21) films are ferromagnetic at room temperature,and the saturation magnetization,coercivity,and saturation field are 16.0 emu/cm 3,167.5×80 A/m and 3740×80 A/m at room temperature,respectively.The room-temperature ferromagnetism of the films can be attributed to the new rutile Ti1-xMnxO2 structure formed by the substitution of Mn4+ for Ti4+ into the TiO2 crystal lattice,and could be explained by O vacancy(VO)-enhanced ferromagnetism model.