Influences of Bias Voltage and Target Current on Structure,Microhardness and Friction Coefficient of Multilayered TiAlN/CrN Coatings Synthesized by Cathodic Arc Plasma Deposition

被引：0

作者：

阴明利 ^{[1
,2
]}

田灿鑫 ^{[2
]}

王泽松 ^{[2
]}

付德君 ^{[2
]}

机构：

[1] College of Science,Xi'an Technological University

[2] School of Physical Science and Technology and Key Laboratory of Artificial Nano-and Micro-materials of Ministry of Education,Wuhan University

来源：

Plasma Science and Technology | 2013年 / 06期

关键词：

TiAlN/CrN; cathodic arc plasma; hardness; friction coefficient;

D O I：

暂无

中图分类号：

TG174.44 [金属复层保护];

学科分类号：

080503 ;

摘要：

Multilayered TiAlN/CrN coatings have been synthesized on stainless steel substrates by cathodic arc plasma deposition using TiAl and Cr targets.Influences of the bias voltage,cathode current ratio ITiAl/ICr,and deposition pressure on the hardness and friction coefficient of the coatings were investigated.The measurement revealed existence of two cubic phases,face-centercubic (Cr,Al)N and(Ti,Al)N,in the coatings deposited under various bias voltages except for the coating deposited at -400 V,which is amorphous.The hardness of the coatings was strongly dependent on the Itial/Icr ratio and deposition pressure,and reached a maximum of 33 GPa at an ITiAl/ICr ratio of 1.0 and a pressure of 1.0 Pa.The incorporation of the element chromium can reduce the density of pinholes in the coatings and assist the optimization of deposition conditions for high quality TiAlN/CrN coatings.

引用

页码：582 / 585

页数：4

共 15 条

[1] Influences of Bias Voltage and Target Current on Structure, Microhardness and Friction Coefficient of Multilayered TiAlN/CrN Coatings Synthesized by Cathodic Arc Plasma Deposition
Yin Mingli
Tian Canxin
Wang Zesong
Fu Dejun
PLASMA SCIENCE & TECHNOLOGY, 2013, 15 (06) : 582 - 585
[2] Influences of Bias Voltage and Target Current on Structure,Microhardness and Friction Coefficient of Multilayered TiAlN/CrN Coatings Synthesized by Cathodic Arc Plasma Deposition
阴明利
田灿鑫
王泽松
付德君
PlasmaScienceandTechnology, 2013, 15 (06) : 582 - 585
[3] Structural and mechanical properties of nanolayered TiAlN/CrN coatings synthesized by a cathodic arc deposition process
Chang, YY
Wang, DY
Hung, CY
SURFACE & COATINGS TECHNOLOGY, 2005, 200 (5-6): : 1702 - 1708
[4] Mechanical properties of TiAlN/CrN nanolayered coatings synthesized by a cathodic-arc deposition process
Chang, Yin-Yu
Wang, Da-Yung
Hung, Chi-Yung
HEAT TREATMENT OF MATERIALS, 2006, 118 (323-327): : 323 - +
[5] Mechanical and tribological properties of multilayered TiSiN/CrN coatings synthesized by a cathodic arc deposition process
Yang, Sheng-Min
Chang, Yin-Yu
Lin, Dong-Yih
Wang, Da-Yung
Wu, Weite
SURFACE & COATINGS TECHNOLOGY, 2008, 202 (10): : 2176 - 2181
[6] Influence of bi-layer thickness on the structure and properties of multilayered TiN/CrN coatings by cathodic arc plasma deposition
Chang, Chi-Lung
Ho, Wei-Yu
Liu, Wen-Jen
Hwang, J. J.
Wang, Da-Yung
SURFACE ENGINEERING (ICSE 2007), 2008, 373-374 : 192 - 195
[7] Deposition of nanolayered CrN/AlBN thin films by cathodic arc deposition: Influence of cathode arc current and bias voltage on the mechanical properties
Kim, Sun Kyu
Van Le, Vinh
SURFACE & COATINGS TECHNOLOGY, 2010, 204 (24): : 3941 - 3946
[8] Influences of bias voltage on properties of TiAl-doped DLC coatings synthesized by cathodic arc evaporation
Chang, CL
Jao, JY
Chang, TC
Ho, WY
Wang, DY
DIAMOND AND RELATED MATERIALS, 2005, 14 (11-12) : 2127 - 2132
[9] The effect of substrate bias voltage on the mechanical and electrochemical corrosion properties of multilayered CrN/CrAlN coatings produced by cathodic arc evaporation
Baseri, Niloofar Arab
Mohammadi, Majid
Ghatee, Mojtaba
Yousefieh, Mohammad
Abassi-Firouzjah, Marzieh
INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY, 2024, 21 (01) : 395 - 407
[10] Microstructural and mechanical properties of graded and multilayered AlxTi1-xN/CrN coatings synthesized by a cathodic-arc deposition process
Chang, Yin-Yu
Chang, Chi-Pang
SURFACE & COATINGS TECHNOLOGY, 2009, 204 (6-7): : 1030 - 1034

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