Wideband thin-film lithium niobate modulator with low half-wave-voltage length product

被引：0

作者：

刘学成 ^{[1
]}

熊兵 ^{[1
]}

孙长征 ^{[1
]}

王健 ^{[1
]}

郝智彪 ^{[1
]}

汪莱 ^{[1
]}

韩彦军 ^{[1
]}

李洪涛 ^{[1
]}

余佳东 ^{[1
]}

罗毅 ^{[1
]}

机构：

[1] Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University

来源：

Chinese Optics Letters | 2021年 / 19卷 / 06期

基金：

中国博士后科学基金; 中国国家自然科学基金; 国家重点研发计划;

关键词：

lithium niobate; electro-optic modulator; wideband; half-wave voltage;

D O I：

暂无

中图分类号：

TB383.2 []; TN761 [调制技术与调制器]; TQ131.11 [];

学科分类号：

070205 ; 080501 ; 080902 ; 0817 ; 1406 ;

摘要：

A novel thin-film lithium niobate(TFLN) electro-optic modulator is proposed and demonstrated. Li Nb O-silica hybrid waveguide is adopted to maintain low optical loss for an electrode spacing as narrow as 3 μm, resulting in a low halfwave-voltage length product of only 1.7 V·cm. Capacitively loaded traveling-wave electrodes are employed to reduce the microwave loss, while a quartz substrate is used in place of a silicon substrate to achieve velocity matching. The fabricated TFLN modulator with a 5-mm-long modulation region exhibits a half-wave voltage of 3.4 V and a merely less than 2 d B roll-off in an electro-optic response up to 67 GHz.

引用

页码：85 / 90

页数：6

共 50 条

[1] Wideband thin-film lithium niobate modulator with low half-wave-voltage length product
Liu, Xuecheng
Xiong, Bing
Sun, Changzheng
Wang, Jian
Hao, Zhibiao
Wang, Lai
Han, Yanjun
Li, Hongtao
Yu, Jiadong
Luo, Yi
[J]. CHINESE OPTICS LETTERS, 2021, 19 (06)
[2] A Highly Compact Thin-film Lithium Niobate Modulator with Low Half-wave Voltage
Liu, Xuecheng
Liu, Hao
Xiong, Bing
Sun, Changzheng
Hao, Zhibiao
Wang, Lai
Wang, Jian
Han, Yanjun
Li, Hongtao
Luo, Yi
[J]. 2022 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC), 2022,
[3] Ultra-wide Bandwidth Thin-film LiNbO3 Modulator with Record-Low Half-wave-voltage Length Product
Liu, Xuecheng
Xiong, Bing
Sun, Changzheng
Wang, Jian
Hao, Zhibiao
Wang, Lai
Han, Yanjun
Li, Hongtao
Yu, Jiadong
Luo, Yi
[J]. 2021 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXPOSITION (OFC), 2021,
[4] Broadband Meandered Thin-Film Lithium Niobate Modulator With Ultra-Low Half-Wave Voltage
Liu, Xuecheng
Liu, Hao
Xiong, Bing
Sun, Changzheng
Hao, Zhibiao
Wang, Lai
Wang, Jian
Han, Yanjun
Li, Hongtao
Luo, Yi
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2022, 34 (08) : 424 - 427
[5] High-Performance Mach-Zehnder Modulator Based on Thin-Film Lithium Niobate with Low Voltage-Length Product
Li, Ying
Lan, Tian
Yang, Dengcai
Bao, Jianfeng
Xiang, Meihua
Yang, Feng
Wang, Zhiyong
[J]. ACS OMEGA, 2023, 8 (10): : 9644 - 9651
[6] Optimization of a Broadband Lithium Niobate-Barium Titanate Hybrid Modulator With Low Half-Wave-Voltage-Length Product
Alam, Ahmed Shariful
Aitchison, J. Stewart
[J]. IEEE PHOTONICS JOURNAL, 2023, 15 (06):
[7] Low Vπ thin-film lithium niobate modulator fabricated with photolithography
Liu, Ye
Li, Heng
Liu, Jia
Tan, Su
Lu, Qiaoyin
Guo, Weihua
[J]. OPTICS EXPRESS, 2021, 29 (05): : 6320 - 6329
[8] Low-Voltage Modulators Using Thin-Film Lithium Niobate
Ahmed, Abu Naim R.
Shi, Shouyuan
Nelan, Sean
Mercante, Andrew J.
Yao, Peng
Prather, Dennis W.
[J]. OPTICAL INTERCONNECTS XX, 2020, 11286
[9] Low Half-wave-voltage Thin Film LiNbO3 Electro-optic Modulator Based on a Compact Electrode Structure
Liu, Xuecheng
Xiong, Bing
Sun, Changzheng
Hao, Zhibiao
Wang, Lai
Wang, Jian
Han, Yanjun
Li, Hongtao
Yu, Jiadong
Luo, Yi
[J]. 2020 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP) AND INTERNATIONAL CONFERENCE ON INFORMATION PHOTONICS AND OPTICAL COMMUNICATIONS (IPOC), 2020,
[10] Nonlinearity Measurement of Thin-Film Lithium Niobate Phase Modulator
Rodriguez, Jeffrey
Poirier, Jason
Li, Yifei
[J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 2023, 41 (20) : 6481 - 6487

← 1 2 3 4 5 →