SPATIAL DISTRIBUTION OF BACKSCATTERED ELECTRONS IN FILM CALCULATED BY MONTE CARLO METHOD

I. INTRODUCTION The spatial density distribution, as well as the action range of iacident electrons and backscattered electrons in film materials are the problems concerned about very much by the scholars engaged in the researches of film X-ray microanalysis (FXMA), transmission electron microscope (TEM) and scanning electron microscope (SEM). But so far no theory calculation results in these aspects have been seen in reports.