Design and fabrication of a micro electromagnetic vibration energy harvester

被引：0
|
作者：
王鹏 [1 ,2 ]
李伟 [3 ]
车录锋 [3 ]
机构：
[1] State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences
[2] Graduate University of the Chinese Academy of Sciences
[3] State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and lnformation Technology,Chinese Academy of Sciences
来源：
Journal of Semiconductors | 2011年 / 32卷 / 10期
关键词：
electromagnetic energy harvester; MEMS; resonance; permanent magnet;
D O I：
暂无
中图分类号：
S225 [收获机械];
学科分类号：
0828 ;
摘要：
This paper presents a new micro electromagnetic energy harvester that can convert transverse vibration energy to electrical power.It mainly consists of folded beams,a permanent magnet and copper planar coils.The calculated value of the natural frequency is 274 Hz and electromagnetic simulation shows that the magnetic flux density will decrease sharply with increasing space between the magnet and coils.A prototype has been fabricated using MEMS micromachining technology.The testing results show that at the resonant frequency of 242 Hz,the prototype can generate 0.55μW of maximal output power with peak-peak voltage of 28 m V for 0.5g（g = 9.8 m/s;） external acceleration.
引用
收藏
页码：74 / 77
页数：4
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