Fabrication of 17×17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

被引:3
|
作者
秦政坤 [1 ,2 ]
贺飞 [1 ]
刘春玲 [1 ]
王立忠 [1 ]
马春生 [2 ]
机构
[1] College of Information and Technology,Jilin Normal University
[2] State Key Laboratory of Integrated Optoelectronics
基金
中国国家自然科学基金;
关键词
arrayed waveguide grating; flat spectral response; steam-redissolution; 3-dB bandwidth; crosstalk;
D O I
暂无
中图分类号
O436.1 [干涉与衍射];
学科分类号
070207 ; 0803 ;
摘要
Arrayed waveguide grating(AWG) is a key device in the wavelength-division multiplexing(WDM) system, and the flat spectral response of the AWG device is required.In this paper,the RIE process has been improved.By using the steam-redissolution technique,the insertion loss and the crosstalk have been reduced.Experimental results show that the central wavelength is 1550.86 nm,the channel spectral response flatness is about 1.5 dB,3-dB bandwidth is about 0.478 nm,insertion loss is 10.5 dB,and crosstalk is about-22 dB.The insertion loss of an AWG device is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels,and the crosstalk is reduced by 2.5 dB after the steam-redissolution.
引用
收藏
页码:29 / 31
页数:3
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