An efficient procedure in quantitative analysis using laser-induced breakdown spectroscopy

Laser-induced breakdown spectroscopy has become a general-purpose technique, and internal standard calibration is a common method for quantitative analysis. Calibration models should be reconstructed for different systems and application environments. This study presents an efficient procedure in the construction and selection of calibration models for LIBS analysis. The procedure concludes data preprocess, calibration model construction, and concentration calculation. These steps can be programmed without manual intervention. Results of the quantitative analysis of Ni-based alloys using the proposed procedure are presented in this study.Ten elements are calibrated, and most have an average relative standard error of less than 10%.The proposed procedure is an effective process for constructing and selecting calibration models.