FABRICATION OF DIAMOND TUBES IN BIAS-ENHANCED HOT-FILAMENT CHEMICAL VAPOR DEPOSITION SYSTEM

被引：1
|
作者：
CHEN Ming MA Yuping XIANG Daohui SUN Fanghong School of Mechanical Engineering
机构：
来源：
Chinese Journal of Mechanical Engineering | 2007年 / 04期
基金：
中国国家自然科学基金;
关键词：
Diamond tube; Hot-filament chemical vapor deposition; Fabrication; High quality;
D O I：
暂无
中图分类号：
TG174.4 [金属表面防护技术];
学科分类号：
080503 ;
摘要：
Deposition of diamond thin films on tungsten wire substrate with the gas mixture of ace- tone and hydrogen by using bias-enhanced hot filament chemical vapor deposition(CVD)with the tantalum wires being optimized arranged is investigated.The self-supported diamond tubes are ob- tained by etching away the tungsten substrates.The quality of the diamond film before and after the removal of substrates is observed by scanning electron microscope(SEM)and Raman spectrum.The results show that the cylindrical diamond tubes with good quality and uniform thickness are obtained on tungsten wires by using bias enhanced hot filament CVD.The compressive stress in diamond film formed during the deposition is released after the substrate etches away by mixture of HOand NHOH.There is no residual stress in diamond tube after substrate removal.
引用
收藏
页码：24 / 26
页数：3
相关论文
共 50 条
  • [1] Fabrication of diamond tubes in bias-enhanced hot-filament chemical vapor deposition system
    Chen, Ming
    Ma, Yuping
    Xiang, Daohui
    Sun, Fanghong
    [J]. Chinese Journal of Mechanical Engineering (English Edition), 2007, 20 (04): : 24 - 26
  • [2] Transverse bias-enhanced nucleation of diamond in hot filament chemical vapor deposition
    Shang, NG
    Fang, RC
    Han, S
    Liao, Y
    Cui, JB
    [J]. MATERIALS RESEARCH INNOVATIONS, 1998, 2 (02) : 79 - 82
  • [3] The effects of bias polarity on diamond deposition by hot-filament chemical vapor deposition
    Chen, W
    Xiao, C
    Yang, Q
    Moewes, A
    Hirose, A
    [J]. CANADIAN JOURNAL OF PHYSICS, 2005, 83 (07) : 753 - 759
  • [4] Growth of self-supported diamond tubes in the hot-filament chemical vapor deposition system
    Baranauskas, V
    Ceragioli, HJ
    Peterlevitz, AC
    [J]. DIAMOND AND RELATED MATERIALS, 2003, 12 (3-7) : 346 - 349
  • [5] Nitrogen and Bias Effect on Homoepitaxial Diamond Growth by Hot-Filament Chemical Vapor Deposition
    Tsai, Hung-Yin
    Chang, Chih-Cheng
    Wu, Chih-Wei
    [J]. ADVANCES IN MATERIALS PROCESSING IX, 2010, 443 : 510 - +
  • [6] Effects of the bias enhanced nucleation hot-filament chemical-vapor deposition parameters on diamond nucleation on iridium
    Arnault, JC
    Schull, G
    Polini, R
    Mermoux, M
    Faerber, J
    [J]. JOURNAL OF APPLIED PHYSICS, 2005, 98 (03)
  • [7] DIAMOND HOMOEPITAXY BY HOT-FILAMENT CHEMICAL-VAPOR-DEPOSITION
    AVIGAL, Y
    UZANSAGUY, C
    KALISH, R
    LEREAH, Y
    [J]. DIAMOND AND RELATED MATERIALS, 1993, 2 (2-4) : 462 - 467
  • [8] Single-Crystal Diamond Needle Fabrication Using Hot-Filament Chemical Vapor Deposition
    Ismagilov, Rinat
    Malykhin, Sergei
    Puzyr, Aleksey
    Loginov, Artem
    Kleshch, Victor
    Obraztsov, Alexander
    [J]. MATERIALS, 2021, 14 (09)
  • [9] Heavy phosphorus doping of diamond by hot-filament chemical vapor deposition
    Katamune, Yuki
    Izumi, Akira
    Ichikawa, Kimiyoshi
    Koizumi, Satoshi
    [J]. DIAMOND AND RELATED MATERIALS, 2023, 134
  • [10] THE MORPHOLOGY OF DIAMOND SYNTHESIZED BY HOT-FILAMENT CHEMICAL VAPOR-DEPOSITION
    KWEON, DW
    LEE, JY
    [J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1992, 11 (15) : 1043 - 1045
12345