Pull-in instability analyses for NEMS actuators with quartic shape approximation

被引：0
|
作者：
Junsheng DUAN [1 ]
Zongxue LI [2 ]
Jinyuan LIU [3 ]
机构：
[1] School of Sciences, Shanghai Institute of Technology
[2] College of Computer and Information, Inner Mongolia Medical University
[3] Department of Information Management, Party School of the Inner Mongolia Committee of the Communist Party of China
来源：
Applied Mathematics and Mechanics(English Edition) | 2016年 / 37卷 / 03期
基金：
上海市自然科学基金; 中国国家自然科学基金;
关键词：
micro-electromechanical system(MEMS); nano-electromechanical system(NEMS); Casimir force; pull-in instability; quartic shape function;
D O I：
暂无
中图分类号：
TH-39 [机电一体化]; TH703 [结构];
学科分类号：
080202 ; 0804 ; 080401 ; 080805 ; 0811 ; 081102 ;
摘要：
The pull-in instability of a cantilever nano-actuator model incorporating the effects of the surface, the fringing field, and the Casimir attraction force is investigated.A new quartic polynomial is proposed as the shape function of the beam during the deflection, satisfying all of the four boundary values. The Gaussian quadrature rule is used to treat the involved integrations, and the design parameters are preserved in the evaluated formulas. The analytic expressions are derived for the tip deflection and pull-in parameters of the cantilever beam. The micro-electromechanical system(MEMS)cantilever actuators and freestanding nano-actuators are considered as two special cases.It is proved that the proposed method is convenient for the analyses of the effects of the surface, the Casimir force, and the fringing field on the pull-in parameters.
引用
收藏
页码：303 / 314
页数：12
相关论文
共 50 条
  • [1] Pull-in instability analyses for NEMS actuators with quartic shape approximation
    Junsheng Duan
    Zongxue Li
    Jinyuan Liu
    Applied Mathematics and Mechanics, 2016, 37 : 303 - 314
  • [2] Pull-in instability analyses for NEMS actuators with quartic shape approximation
    Duan, Junsheng
    Li, Zongxue
    Liu, Jinyuan
    APPLIED MATHEMATICS AND MECHANICS-ENGLISH EDITION, 2016, 37 (03) : 303 - 314
  • [3] Electrostatic pull-in instability in MEMS/NEMS: A review
    Zhang, Wen-Ming
    Yan, Han
    Peng, Zhi-Ke
    Meng, Guang
    SENSORS AND ACTUATORS A-PHYSICAL, 2014, 214 : 187 - 218
  • [4] Effect of flexoelectricity on the Pull-in instability of beam-type NEMS
    Dehkordi, Mostafa Farajzadeh
    Beni, Yaghoub Tadi
    Dashtaki, P. Mohammadi
    Vanani, S. M. Fatemi
    ENGINEERING ANALYSIS WITH BOUNDARY ELEMENTS, 2023, 155 : 87 - 107
  • [5] Influence of surface effects on the pull-in instability of NEMS electrostatic switches
    Ma, Jianming Bryan
    Jiang, Liying
    Asokanthan, Samuel F.
    NANOTECHNOLOGY, 2010, 21 (50)
  • [6] Quasi-Static Pull-in: an Instability in Electrostatic Actuators
    M. S. Al-Ghamdi
    M. E. Khater
    E. M. Abdel-Rahman
    E. G. Nepomuceno
    Scientific Reports, 10
  • [7] Quasi-Static Pull-in: an Instability in Electrostatic Actuators
    Al-Ghamdi, M. S.
    Khater, M. E.
    Abdel-Rahman, E. M.
    Nepomuceno, E. G.
    SCIENTIFIC REPORTS, 2020, 10 (01)
  • [8] Pull-in instability of micro-switch actuators: Model review
    Lin, Wen-Hui
    Zhao, Ya-Pu
    INTERNATIONAL JOURNAL OF NONLINEAR SCIENCES AND NUMERICAL SIMULATION, 2008, 9 (02) : 175 - 183
  • [9] Pull-in instability behaviour of nanoscale actuators using nonlocal elasticity theory
    Peng, Jianshe
    Luo, Guangbing
    Yang, Liu
    Yang, Jie
    AUTOMATION EQUIPMENT AND SYSTEMS, PTS 1-4, 2012, 468-471 : 2755 - +
  • [10] Pull-in instability analysis of electrostatically actuated microplate with rectangular shape
    Binglei Wang
    Shenjie Zhou
    Junfeng Zhao
    Xi Chen
    International Journal of Precision Engineering and Manufacturing, 2011, 12 : 1085 - 1094
12345